Application of IR ellipsometry to determination of the film...

Application of IR ellipsometry to determination of the film thickness of a polytetrafluoroethylene sample modified in direct-current discharge

M. O. Makeev, Yu. A. Ivanov, S. A. Meshkov, A. B. Gil’man, M. Yu. Yablokov
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Volume:
45
Language:
english
Pages:
3
DOI:
10.1134/s0018143911060129
Date:
November, 2011
File:
PDF, 154 KB
english, 2011
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