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Studies on the RF sputtered amorphous SiGe thin films
M. Serényi, T. Lohner, Z. Zolnai, P. Petrik, Á. Nemcsics, N. Q. Khánh, P. TurmezeiVolume:
42
Language:
english
Pages:
4
DOI:
10.1134/s002016850601002x
Date:
January, 2006
File:
PDF, 119 KB
english, 2006