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Silicon epilayers grown by chemical vapor deposition from high-purity silane
A. V. Gusev, O. F. Udalov, V. S. Krasil’nikov, G. A. Maksimov, A. V. Kornaukhov, O. A. Kuznetsov, E. A. Uskova, V. B. ShmaginVolume:
42
Language:
english
Pages:
4
DOI:
10.1134/s0020168506080012
Date:
August, 2006
File:
PDF, 162 KB
english, 2006