Hydrocarbon impurities in SiF4and SiH4prepared from it

Inorganic Materials 2007 / 04 Vol. 43; Iss. 4

Hydrocarbon impurities in SiF4and SiH4prepared from it

A. D. Bulanov, P. G. Sennikov, V. A. Krylov, T. G. Sorochkina, L. A. Chuprov, O. Yu. Chernova, O. Yu. Troshin
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Volume:
43
Language:
english
Pages:
5
DOI:
10.1134/s0020168507040061
Date:
April, 2007
File:
PDF, 151 KB
english, 2007
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