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Microhardness of silicon layers grown by liquid phase epitaxy
D. I. Brinkevich, S. A. Vabishchevich, V. S. ProsolovichVolume:
43
Language:
english
Pages:
5
DOI:
10.1134/s0020168507100019
Date:
October, 2007
File:
PDF, 223 KB
english, 2007