Composition and structure of hafnia films on silicon

Inorganic Materials 2008 / 09 Vol. 44; Iss. 9

Composition and structure of hafnia films on silicon

T. P. Smirnova, V. V. Kaichev, L. V. Yakovkina, V. I. Kosyakov, S. A. Beloshapkin, F. A. Kuznetsov, M. S. Lebedev, V. A. Gritsenko
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Volume:
44
Language:
english
Pages:
6
DOI:
10.1134/s0020168508090124
Date:
September, 2008
File:
PDF, 383 KB
english, 2008
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