Thermodynamic modeling of BCxNychemical vapor deposition from mixtures ofN-trimethylborazine and nitrogen
A. N. Golubenko, M. L. Kosinova, V. S. Sulyaeva, Yu. M. Rumyantsev, N. I. Fainer, F. A. KuznetsovVolume:
45
Language:
english
Pages:
4
DOI:
10.1134/s0020168509120061
Date:
December, 2009
File:
PDF, 194 KB
english, 2009