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A multibeam radio-frequency ion source with a discharge chamber inside a resonator
B. Yu. Bogdanovich, V. P. Zubovskii, A. V. Nesterovich, V. N. Pashentsev, V. N. Solov’evVolume:
51
Language:
english
Pages:
4
DOI:
10.1134/s0020441208050151
Date:
September, 2008
File:
PDF, 133 KB
english, 2008