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A compact vapor source of conductive target material sputtered by 3-keV ions at 0.05-Pa pressure
S. N. Grigoriev, Yu. A. Melnik, A. S. Metel, V. V. Panin, V. V. PrudnikovVolume:
52
Language:
english
Pages:
7
DOI:
10.1134/s0020441209050170
Date:
September, 2009
File:
PDF, 192 KB
english, 2009