![](/img/cover-not-exists.png)
An installation for magnetron deposition of getter coatings in narrow-aperture chambers
V. V. Anashin, A. A. Zhukov, A. A. Krasnov, A. M. SemenovVolume:
52
Language:
english
Pages:
4
DOI:
10.1134/s0020441209060232
Date:
November, 2009
File:
PDF, 153 KB
english, 2009