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Determination of electron temperature in low-pressure plasmas by means of optical emission spectroscopy
S. Mitic, B. A. Klumov, M. Y. Pustylnik, G. E. MorfillVolume:
91
Language:
english
Pages:
5
DOI:
10.1134/s0021364010050061
Date:
March, 2010
File:
PDF, 291 KB
english, 2010