Changes in the silicon microhardness induced by a...

Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques 2007 / 04 Vol. 1; Iss. 2

Changes in the silicon microhardness induced by a low-intensity electron beam

Yu. I. Golovin, A. A. Dmitrievskii, N. Yu. Suchkova, M. Yu. Tolotaev
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Volume:
1
Language:
english
Pages:
3
DOI:
10.1134/s1027451007020176
Date:
April, 2007
File:
PDF, 140 KB
english, 2007
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