Application of a grid hollow cathode for substrate cleaning...

Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques 2008 / 06 Vol. 2; Iss. 3

Application of a grid hollow cathode for substrate cleaning before vacuum deposition of coatings

A. V. Rogov, A. A. Lozovan
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Volume:
2
Language:
english
Pages:
5
DOI:
10.1134/s1027451008030154
Date:
June, 2008
File:
PDF, 367 KB
english, 2008
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