Influence of composition and molecular weight...

Influence of composition and molecular weight characteristics of methacrylic copolymers on their sensitivity to extreme ultraviolet radiation

S. A. Bulgakova, I. P. Ivanov, A. Ya. Lopatin, L. M. Mazanova
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Volume:
2
Language:
english
Pages:
5
DOI:
10.1134/s1027451008030282
Date:
June, 2008
File:
PDF, 167 KB
english, 2008
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