Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques
2008 / 06 Vol. 2; Iss. 3
![](/img/cover-not-exists.png)
Influence of composition and molecular weight characteristics of methacrylic copolymers on their sensitivity to extreme ultraviolet radiation
S. A. Bulgakova, I. P. Ivanov, A. Ya. Lopatin, L. M. MazanovaVolume:
2
Language:
english
Pages:
5
DOI:
10.1134/s1027451008030282
Date:
June, 2008
File:
PDF, 167 KB
english, 2008