Fabrication of LIGA masks for microfluidic analytical...

Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques 2008 / 08 Vol. 2; Iss. 4

Fabrication of LIGA masks for microfluidic analytical systems

B. G. Goldenberg, T. N. Goryachkovskaya, V. S. Eliseev, N. A. Kolchanov, V. I. Kondrat’ev, G. N. Kulipanov, V. M. Popik, S. E. Pel’tek, E. V. Petrova, V. F. Pindyurin
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Volume:
2
Language:
english
Pages:
4
DOI:
10.1134/s1027451008040265
Date:
August, 2008
File:
PDF, 256 KB
english, 2008
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