Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques
2009 / 08 Vol. 3; Iss. 4
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Bulk model of rapid thermal oxidation of silicon
O. V. Aleksandrov, A. I. Dus’Volume:
3
Language:
english
Pages:
7
DOI:
10.1134/s1027451009040235
Date:
August, 2009
File:
PDF, 202 KB
english, 2009