Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques
2009 / 08 Vol. 3; Iss. 4
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Anisotropic dissolution of single-crystal silicon near the chemical mask edge on the (001) surface
A. E. Usenko, A. V. YukhnevichVolume:
3
Language:
english
Pages:
7
DOI:
10.1134/s1027451009040247
Date:
August, 2009
File:
PDF, 335 KB
english, 2009