Synthesis of nanostructured SiC films during pulsed photon...

Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques 2009 / 10 Vol. 3; Iss. 5

Synthesis of nanostructured SiC films during pulsed photon treatment of Si in a carbon-containing atmosphere

V. M. Ievlev, V. S. Ilyin, S. B. Kushev, S. A. Soldatenko, A. N. Lukin, E. K. Belonogov
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Volume:
3
Language:
english
Pages:
6
DOI:
10.1134/s102745100905022x
Date:
October, 2009
File:
PDF, 282 KB
english, 2009
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