Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques
2010 / 10 Vol. 4; Iss. 5
Fabrication of specified-geometry metal pattern by proton irradiation through a single-layer mask
B. A. Gurovich, A. G. Domantovskii, K. I. MaslakovVolume:
4
Language:
english
Pages:
5
DOI:
10.1134/s1027451010050046
Date:
October, 2010
File:
PDF, 190 KB
english, 2010