Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques
2010 / 10 Vol. 4; Iss. 5
Comparative study of cathode and magnetron sputtering methods for depositing Pb(TiZr)O3ferroelectric film
V. G. Beshenkov, A. G. Znamenskii, V. A. MarchenkoVolume:
4
Language:
english
Pages:
3
DOI:
10.1134/s1027451010050101
Date:
October, 2010
File:
PDF, 152 KB
english, 2010