Features of the manufacture of deep X-ray lithography masks...

Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques 2011 / 02 Vol. 5; Iss. 1

Features of the manufacture of deep X-ray lithography masks in the siberian synchrotron and terahertz radiation center

B. G. Gol’denberg, A. Yu. Abramskii, A. G. Zelinskii, A. I. Maslii, E. A. Maksimovskii, V. I. Kondrat’ev, V. P. Korol’kov, K. E. Kuper, E. V. Petrova, V. F. Pindyurin
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Volume:
5
Language:
english
Pages:
7
DOI:
10.1134/s1027451010111011
Date:
February, 2011
File:
PDF, 2.67 MB
english, 2011
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