Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques
2011 / 08 Vol. 5; Iss. 4
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Graphite foil as the supporting membrane of LIGA masks
A. N. Gentselev, S. K. Golubtsov, B. G. Gol’denberg, V. I. Kondrat’ev, V. F. Pindyurin, A. G. ZelinskiiVolume:
5
Language:
english
Pages:
5
DOI:
10.1134/s1027451011020091
Date:
August, 2011
File:
PDF, 1.69 MB
english, 2011