Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques
2011 / 06 Vol. 5; Iss. 3
TOF-SIMS 5 instrument sensitivity to matrix elements in GeSi Layers: Analysis based on recording of complex secondary ions
M. N. Drozdov, Yu. N. Drozdov, D. N. Lobanov, A. V. Novikov, D. V. YurasovVolume:
5
Language:
english
Pages:
4
DOI:
10.1134/s1027451011060073
Date:
June, 2011
File:
PDF, 154 KB
english, 2011