TOF-SIMS 5 instrument sensitivity to matrix elements in...

TOF-SIMS 5 instrument sensitivity to matrix elements in GeSi Layers: Analysis based on recording of complex secondary ions

M. N. Drozdov, Yu. N. Drozdov, D. N. Lobanov, A. V. Novikov, D. V. Yurasov
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Volume:
5
Language:
english
Pages:
4
DOI:
10.1134/s1027451011060073
Date:
June, 2011
File:
PDF, 154 KB
english, 2011
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