Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques
2011 / 10 Vol. 5; Iss. 5
Studies of structure and composition of a Pt-based basic electrode for deposition of PZT ferroelectric films on silicon substrates
V. G. Beshenkov, A. G. Znamenskii, V. A. MarchenkoVolume:
5
Language:
english
Pages:
4
DOI:
10.1134/s1027451011100041
Date:
October, 2011
File:
PDF, 149 KB
english, 2011