Testing the electromigration resistance of Al metallization...

Russian Microelectronics 2006 / 07-08 Vol. 35; Iss. 4

Testing the electromigration resistance of Al metallization patterns by electrical-resistance measurement

M. I. Gorlov, V. I. Plebanovich, A. V. Strogonov
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Volume:
35
Language:
english
Pages:
8
DOI:
10.1134/s1063739706040056
Date:
July, 2006
File:
PDF, 265 KB
english, 2006
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