LPCVD borophosphosilicate-glass films: Deposition and properties
A. S. Turtsevich, O. Yu. Nalivaiko, L. P. AnufrievVolume:
36
Language:
english
Pages:
10
DOI:
10.1134/s1063739707040051
Date:
July, 2007
File:
PDF, 249 KB
english, 2007