Initial stage of semiinsulating polycrystalline silicon...

Russian Microelectronics 2008 / 11 Vol. 37; Iss. 6

Initial stage of semiinsulating polycrystalline silicon film growth

A. S. Turtsevich, O. Yu. Nalivaiko, V. A. Solodukha, V. V. Glukhmanchuk, N. G. Tsirkunova, G. V. Lepeshkevich
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Volume:
37
Language:
english
Pages:
7
DOI:
10.1134/s1063739708060012
Date:
November, 2008
File:
PDF, 607 KB
english, 2008
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