Scanning electron microscopy used to measure the feature...

Russian Microelectronics 2011 / 11 Vol. 40; Iss. 6

Scanning electron microscopy used to measure the feature dimensions of a nanoscale test pattern on a silicon surface

V. P. Gavrilenko, Yu. V. Larionov, V. B. Mityukhlyaev, A. V. Rakov, P. A. Todua, M. N. Filippov, V. A. Sharonov
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Volume:
40
Language:
english
Pages:
5
DOI:
10.1134/s1063739711060060
Date:
November, 2011
File:
PDF, 1.02 MB
english, 2011
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