![](/img/cover-not-exists.png)
Nanoscale structure formation by plasma etching
A. A. Golishnikov, M. G. Putrya, E. N. RybachekVolume:
40
Language:
english
Pages:
4
DOI:
10.1134/s1063739711070079
Date:
December, 2011
File:
PDF, 716 KB
english, 2011