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Difference method for solution of the inverse problem of reflectometry of multilayer films
S. B. Astaf’ev, S. F. Borisova, B. M. Shchedrin, L. G. YanusovaVolume:
51
Language:
english
Pages:
5
DOI:
10.1134/s1063774506040249
Date:
July, 2006
File:
PDF, 232 KB
english, 2006