High-resolution lithography based on selective removal of atoms
A. G. Domantovskiĭ, B. A. Gurovich, K. I. MaslakovVolume:
51
Language:
english
Pages:
1
DOI:
10.1134/s1063774506070285
Date:
December, 2006
File:
PDF, 214 KB
english, 2006