Features of Controlled Laser Thermal Cleavage of Crystalline Silicon
A. N. Serdyukov, S. V. Shalupaev, Yu. V. NikityukVolume:
55
Language:
english
Pages:
5
DOI:
10.1134/s1063774510060064
Date:
November, 2010
File:
PDF, 222 KB
english, 2010