Distribution of germanium in Si1 −xGex(x< 0.1) layers grown on the Si(001) substrate as a function of layer thickness
V. S. Bagaev, V. S. Krivobok, V. P. Martovitsky, A. V. NovikovVolume:
109
Language:
english
Pages:
14
DOI:
10.1134/s1063776109120115
Date:
December, 2009
File:
PDF, 988 KB
english, 2009