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Resonance microwave volume plasma source
N. K. Berezhetskaya, V. A. Kop’ev, I. A. Kossyi, N. I. Malykh, M. A. Misakyan, M. I. Taktakishvili, S. M. Temchin, Young Dong LeeVolume:
33
Language:
english
Pages:
11
DOI:
10.1134/s1063780x07070094
Date:
July, 2007
File:
PDF, 460 KB
english, 2007