Measurements and calculations of the electron distribution...

Measurements and calculations of the electron distribution function in the electronegative plasma of a hollow-cathode discharge in N2: SF6mixtures

V. V. Tsiolko, V. Yu. Bazhenov, A. I. Shchedrin, A. G. Kalyuzhnaya
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Volume:
35
Language:
english
Pages:
7
DOI:
10.1134/s1063780x09100110
Date:
October, 2009
File:
PDF, 213 KB
english, 2009
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