Study of the plasma parameters in a high-current pulsed magnetron sputtering system
A. N. Odivanova, V. G. Podkovyrov, N. S. Sochugov, K. V. OskomovVolume:
37
Language:
english
Pages:
5
DOI:
10.1134/s1063780x1101003x
Date:
March, 2011
File:
PDF, 227 KB
english, 2011