Coaxial microwave plasma source

Plasma Physics Reports 2011 / 11 Vol. 37; Iss. 11

Coaxial microwave plasma source

S. I. Gritsinin, P. A. Gushchin, A. M. Davydov, I. A. Kossyi, M. S. Kotelev
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Volume:
37
Language:
english
Pages:
7
DOI:
10.1134/s1063780x11100059
Date:
November, 2011
File:
PDF, 710 KB
english, 2011
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