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Anodization of aluminum and silicon in plasma of a non-self-sustained glow discharge
Yu. A. Burachevsky, V. A. Burdovitsin, E. M. OksVolume:
37
Language:
english
Pages:
4
DOI:
10.1134/s1063780x11120014
Date:
December, 2011
File:
PDF, 301 KB
english, 2011