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Dislocation-related luminescence in single-crystal silicon subjected to silicon ion implantation and subsequent annealing
N. A. Sobolev, A. M. Emel’yanov, V. I. Sakharov, I. T. Serenkov, E. I. Shek, D. I. Tetel’baumVolume:
41
Language:
english
Pages:
3
DOI:
10.1134/s1063782607050107
Date:
May, 2007
File:
PDF, 191 KB
english, 2007