Simulation of degradation of the profile of nanoporous...

Simulation of degradation of the profile of nanoporous silicon in the course of annealing in an inhomogeneous temperature field

B. M. Kostishko, A. V. Zolotov, Yu. S. Nagornov
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Volume:
43
Language:
english
Pages:
4
DOI:
10.1134/s1063782609030178
Date:
March, 2009
File:
PDF, 240 KB
english, 2009
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