![](/img/cover-not-exists.png)
Redistribution of deep selenium and sulfur impurities in silicon upon surface doping with phosphorus
Yu. A. Astrov, V. A. Kozlov, A. N. Lodygin, L. M. Portsel, V. B. Shuman, E. L. Gurevich, R. HergenröderVolume:
43
Language:
english
Pages:
6
DOI:
10.1134/s1063782609060049
Date:
June, 2009
File:
PDF, 222 KB
english, 2009