Ion implantation of platinum from pulsed laser plasma for...

Semiconductors 2011 / 05 Vol. 45; Iss. 5

Ion implantation of platinum from pulsed laser plasma for fabrication of a hydrogen detector based on ann-6H-SiC crystal

V. Yu. Fominskii, R. I. Romanov, A. G. Gnedovets, V. V. Zuev, M. V. Demin, V. V. Grigoriev
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Volume:
45
Language:
english
Pages:
8
DOI:
10.1134/s1063782611050095
Date:
May, 2011
File:
PDF, 431 KB
english, 2011
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