![](/img/cover-not-exists.png)
Structural studies of thin silicon layers repeatedly implanted by carbon ions
K. Kh. Nusupov, N. B. Beisenkhanov, I. V. Valitova, E. A. Dmitrieva, D. Zhumagaliuly, E. A. ShilenkoVolume:
48
Language:
english
Pages:
13
DOI:
10.1134/s1063783406070079
Date:
July, 2006
File:
PDF, 339 KB
english, 2006