Specific features of morphology and the structure of nanocrystalline cubic silicon carbide films grown on a silicon surface
L. K. Orlov, Yu. N. Drozdov, V. I. Vdovin, Yu. I. Tarasova, T. N. SmyslovaVolume:
51
Language:
english
Pages:
6
DOI:
10.1134/s106378340905028x
Date:
May, 2009
File:
PDF, 632 KB
english, 2009