Sputtering of the magnetron diode target in the presence of...

Sputtering of the magnetron diode target in the presence of an external ion beam

V. V. Zhukov, V. P. Krivobokov, S. N. Yanin
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Volume:
51
Language:
english
Pages:
6
DOI:
10.1134/s1063784206040098
Date:
April, 2006
File:
PDF, 194 KB
english, 2006
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