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Sputtering of the magnetron diode target in the presence of an external ion beam
V. V. Zhukov, V. P. Krivobokov, S. N. YaninVolume:
51
Language:
english
Pages:
6
DOI:
10.1134/s1063784206040098
Date:
April, 2006
File:
PDF, 194 KB
english, 2006