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Effect of rapid thermal annealing on the properties of thin dielectric films of gadolinium, titanium, and erbium oxides on the silicon carbide surface
Yu. Yu. Bacherikov, N. L. Dmitruk, R. V. Konakova, O. S. Kondratenko, O. S. Lytvyn, V. V. Milenin, O. B. Okhrimenko, L. M. Kapitanchuk, A. M. Svetlichnyi, V. V. Polyakov, A. A. ShelcunovVolume:
52
Language:
english
Pages:
5
DOI:
10.1134/s106378420702017x
Date:
February, 2007
File:
PDF, 267 KB
english, 2007