Low-pressure inductively coupled plasma as a new source of...

Technical Physics Letters 2006 / 11 Vol. 32; Iss. 11

Low-pressure inductively coupled plasma as a new source of molecular beams

V. L. Ryabov, V. F. Ezhov, M. A. Kartasheva
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Volume:
32
Language:
english
Pages:
3
DOI:
10.1134/s1063785006110198
Date:
November, 2006
File:
PDF, 179 KB
english, 2006
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