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Two-stage doping of silicon with phosphorus-32 and sulfur-32 isotopes
Sh. Makhkamov, N. A. Tursunov, M. Karimov, A. R. Sattiev, M. Ashurov, M. Érdonov, Kh. M. KholmedovVolume:
34
Language:
english
Pages:
3
DOI:
10.1134/s1063785008070110
Date:
July, 2008
File:
PDF, 176 KB
english, 2008