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Formation and use of positioning marks in scanning probe microscopy
V. N. Lozovskii, S. N. Chebotarev, V. A. Irkha, G. V. ValovVolume:
36
Language:
english
Pages:
2
DOI:
10.1134/s1063785010080171
Date:
August, 2010
File:
PDF, 208 KB
english, 2010