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Prospects for the application of nanostructured polymer and nanocomposite films based on poly-p-xylylene for micro-, opto-, and nanoelectronics
A. V. Gusev, K. A. Mailyan, A. V. Pebalk, I. A. Ryzhikov, S. N. ChvalunVolume:
54
Language:
english
Pages:
11
DOI:
10.1134/s1064226909070122
Date:
July, 2009
File:
PDF, 269 KB
english, 2009